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US 12,730,061 B2Granted
Vibration damped sensor device
AssigneeSensirion Connected Solutions AG
InventorsLuca Rabezzana, Niculin Duri Pfister, Reto Clopath, Dominik Niederberger
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Abstract
A sensor device robust against vibrations is proposed. A sensor module is encapsulated with a housing and the space in between is filled with a vibration damping material such that the sensor module is only supported by the vibration damping material. A cavity in the housing formed partly by the sensor module and sealed against liquid water but permeable to a target component of ambient air allows for a fast sensor response time.
Claims12
A sensor device for measuring a target quantity in ambient air comprising:
- a sensor module with a first side, wherein the sensor module comprises a sensitive element,
- a housing, wherein the housing comprises an opening, a first interface for supplying power to the sensor module and a second interface for exchanging data with the sensor module, wherein the housing surrounds the sensor module,
- vibration damping material between the sensor module and the housing,
- a sealing attached to the first side and the opening, wherein the sealing, the first side, and the opening form a cavity,
- wherein the sensor module is connected to the first and second interfaces for supplying power and for exchanging data by one or more connecting means,
- wherein the sensitive element is in fluidic communication with the cavity,
- wherein structure-borne noise is transmitted from the housing to the sensor module only through the vibration damping material, the sealing, and the one or more connecting means, and
- the housing, the sealing, and the first side are arranged and configured such that liquid water cannot enter the vibration damping material.
5 more elements
Dependencies are inferred from the claim text.