Substance detecting system
AssigneeI-PEX Inc.
InventorsKenji Ogata, Shogo Kurogi
Life of this patent
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Abstract
A substance detecting system (1) includes a plurality of substrates (2). In each of the substrates (2), a plurality of through-holes (3) through which gas (G) flows is arranged. In each of the substrates (2), in at least one of the through-holes (3), a substance sensor (4) to detect a target substance contained in the gas (G) flowing through the through-hole (3) is installed. The substrates (2) are stacked in such a way that through-holes (3) corresponding to each other communicate with each other. Because of this configuration, a plurality of flow paths (5) for the gas (G) extending in the stacking direction of the substrates (2) is formed. In the substance detecting system (1), a plurality of the substance sensors (4) is arranged in at least one flow path (5).
Claims15
A substance detecting system, comprising:
- a plurality of substrates in each of which a plurality of through-holes through which gas flows is arranged and, in at least one of the through-holes, a substance sensor to detect a target substance contained in the gas flowing through the through-hole is installed, wherein
- by the substrates being stacked in such a manner that the through-holes communicate with each other, a plurality of flow paths for the gas, the flow paths extending in a stacking direction of the substrates, are formed, and
- in at least one of the flow paths, a plurality of the substance sensors are arranged.
Dependencies are inferred from the claim text.