Wafer temperature sensor including optical fiber, wafer temperature sensor system, and method of manufacturing wafer temperature sensor

A wafer temperature sensor comprising:

• a first wafer;
• a second wafer bonded to the first wafer;
• and
• a plurality of fiber bragg gratings (FBG)-type optical fibers disposed in a plurality of spiral grooves included in at least one of the first wafer and the second wafer,
• wherein each of the plurality of FBG-type optical fibers comprises a plurality of temperature measurement points,
• wherein the plurality of FBG-type optical fibers do not intersect each other and each FBG-type optical fiber, of the plurality of FBG-type optical fibers is in a respective groove of the plurality of spiral grooves, and
• wherein each of the plurality of temperature measurement points comprises a grating in which a plurality of reflective patterns having spacing changed by temperature are disposed.

A wafer temperature sensor system comprising:

• a first wafer, a second wafer, a plurality of fiber bragg gratings (FBG)-type optical fibers, a detector including a light emitter and a light receiver, an optical cable configured to relay light between the FBG-type optical fiber and the detector, and a computer configured to process a signal from the light receiver,
• wherein a first surface of the first wafer and a first surface of the second wafer are bonded to each other,
• wherein at least one of the first surface of the first wafer and the first surface of the second wafer comprises a plurality of spiral grooves,
• wherein each FBG-type optical fiber, of the plurality of FBG-type optical fibers, is in a respective groove of the plurality of spiral grooves, and
• wherein the FBG-type optical fiber comprises a plurality of temperature measurement points in the groove.