Inertial sensor
AssigneesDenso Corporation, Toyota Jidosha Kabushiki Kaisha, MIRISE Technologies Corporation
InventorsKeitaro Ito, Shota Harada, Katsuaki Goto, Yuuki Inagaki, Hideaki Nishikawa, Takahiko Yoshida, Yusuke Kawai
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Abstract
An inertial sensor includes a resonator, a mounting board, and an actuator. The resonator has a first drive mode and a second drive mode. The mounting board has a plurality of electrode portions arranged at a distance from each other and surrounding the resonator. The actuator is configured to vibrate in a z-axis direction. The z-axis direction is a direction orthogonal to a planar direction of the mounting board. The actuator is further configured to vibrate the resonator in the z-axis direction to cause a resonance mode.
Claims8
An inertial sensor comprising:
- a resonator having a first drive mode and a second drive mode;
- a mounting board having a plurality of electrode portions arranged at a distance from each other and surrounding the resonator;
- and
- an actuator configured to vibrate in a z-axis direction, the z-axis direction being a direction orthogonal to a planar direction of the mounting board, wherein
- the actuator is further configured to vibrate the resonator in the z-axis direction to cause a resonance mode.
Dependencies are inferred from the claim text.