Thickness-distribution measurement device and thickness-distribution measurement method
AssigneeHamamatsu Photonics K.K.
InventorsKunihiko Tsuchiya, Toru Matsumoto, Tetsuya Taka, Kenichi Ohtsuka
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AssigneeHamamatsu Photonics K.K.
InventorsKunihiko Tsuchiya, Toru Matsumoto, Tetsuya Taka, Kenichi Ohtsuka
Estimating the term…
A thickness-distribution measurement device includes a light source; a light detector; and a control device. The light source irradiates a region of an object being conveyed with light, the region extending in a width direction. The light detector detects emitted light that has transmitted through the object. The control device obtains information on a distribution of a relative thickness of the object in the width direction based on a detection result in the light detector. The light detector includes an image sensor and a lens array. The image sensor includes a plurality of pixels arranged in the width direction, and detects an intensity of the emitted light for each pixel. The lens array includes a plurality of lenses having an equal magnification and arranged along the width direction, and collects the emitted light and forms an image of the emitted light on the image sensor.
A thickness-distribution measurement device comprising:
A thickness-distribution measurement method comprising:
Dependencies are inferred from the claim text.