Fluid device

A fluid device comprising:

• a valve unit formed axially extending along an axis and configured to be movable along the axis;
• a body having a valve hole and a fluid channel formed inside the body, the valve unit moving closer to or away from the valve hole, and a fluid being allowed to flow through the fluid channel;
• a diaphragm unit having a thin film part and a base part, the thin film part being connected to an outer circumferential face of the valve unit and formed annularly about the axis so as to isolate a valve chamber from an adjacent space adjacent to the valve chamber, the valve unit being arranged in the valve chamber, and the base part being connected on an outer circumferential side of the thin film part and formed annularly about the axis;
• a static charge eliminating unit formed annularly about the axis and arranged interposed between the body and the base part in a direction along the axis;
• and
• an electrical conduction part being in contact with the static charge eliminating unit and being maintained at a ground potential,
• wherein the static charge eliminating unit has an exposed part formed of an electroconductive fluororesin material and exposed to the valve chamber, the electroconductive fluororesin material containing a fluororesin material and an electroconductive material dispersed in the fluororesin material.