Hybrid gettering diffusion pump

A vacuum pump comprising:

• a pump chamber;
• a pump wall surrounding the pump chamber;
• a vacuum port into the pump chamber to fluidically couple the pump chamber to a vacuum chamber located external to the pump chamber;
• an exhaust port into the pump chamber to fluidically couple the pump chamber to a backing pump for removal of gas from the pump chamber;
• a getter region to hold a getter, wherein the getter region is coupled to the pump chamber;
• a heater thermally coupled to the getter region to liquefy the getter in the getter region;
• a valve to seal off the getter region from the pump chamber;
• a foreline coupler to couple the exhaust port to a backing pump;
• a chamber baffle arranged in the pump chamber to elevate pressure within the pump chamber near the exhaust port;
• and
• at least one injector fluidically coupled to the getter region and arranged to spray liquefied getter from the getter region into the pump chamber to remove a gaseous substance of the gas from the pump chamber by chemically binding of the gaseous substance with the sprayed liquefied getter, wherein the at least one injector is arranged to spray the liquefied getter in a direction to move the gas within the pump chamber towards the exhaust port for evacuation from the pump chamber.