Probe card gripper and transfer device comprising same
AssigneeSemes Co., Ltd.
InventorsDa Han Kim, Seung Chan Lee, Ho Young Lee
Life of this patent
Estimating the term…
Abstract
A gripper gripping a plurality of types of probe cards includes a frame, a driving unit connected to the frame, and a plurality of gripper portions connected to the driving unit and including an inner gripper portion and an outer gripper portion. The gripper portions include a moving block moving in a radial direction as the driving unit is driven, and the inner gripper portion and the outer gripper portion connected to the moving block. The outer gripper portion is rotatably connected to the moving block, and is configured such that the outer gripper portion rotates downward with respect to the moving block as the moving block moves in a radial outward direction.
Claims18
A gripper comprising:
- a frame;
- a driving unit connected to the frame;
- and
- a plurality of gripper portions connected to the driving unit and including an inner gripper portion and an outer gripper portion,
- wherein the gripper portions include a moving block moving in a radial direction as the driving unit is driven, and the inner gripper portion and the outer gripper portion connected to the moving block, and
- the outer gripper portion is rotatably connected to the moving block, and is configured such that the outer gripper portion rotates downward with respect to the moving block as the moving block moves in a radial outward direction a carriage return and indent wherein the outer gripper portion is provided with a first hinge on one end connected to the moving block, and is provided with a bent portion bent inwardly on the other end, and
- the frame includes a guide portion extending in the radial direction and guiding the moving block, and,
- wherein the frame is provided with a rotating plate on a center thereof, and
- the driving unit is connected to the moving block of the plurality of gripper portions through the rotating plate.
A gripper comprising:
- a frame;
- a driving unit connected to the frame;
- a plurality of gripper portions connected to the driving unit and including an inner gripper portion and an outer gripper portion;
- and
- a rotating plate provided inside the frame and connecting the driving unit and the plurality of gripper portions,
- wherein the frame includes a guide portion extending in a radial direction from a rotation axis of the rotating plate and guiding movement of the gripper portions,
- the gripper portions include a moving block moving along the guide portion by driving the driving unit, and the inner gripper portion and the outer gripper portion connected to the moving block,
- the outer gripper portion is provided with a first hinge on one end connected to the moving block, and is provided with a bent portion bent inwardly on the other end,
- the inner gripper portion is provided with a bent portion bent inwardly, and
- the outer gripper portion is connected to a first pin located lower than the first hinge such that the bent portion of the outer gripper portion rises when the moving block moves inwardly in the radial direction.
Dependencies are inferred from the claim text.