Printhead, system and method for direct write vapor deposition

A system for direct write vapor deposition, the system comprising:

• a printhead comprising:
• a nozzle body including a reservoir for holding a material to be printed;
• and
• a nozzle head protruding from the nozzle body and including a nozzle opening for ejection of the material as a vapor-phase ink, the nozzle opening being in fluid communication with the reservoir;
• a heat source positioned to heat the printhead;
• a substrate in opposition to the nozzle opening for deposition of the vapor-phase ink;
• and
• an x-y-z motion stage configured to move the substrate relative to the printhead,
• wherein the system is enclosed in a vacuum chamber for operation.

A method for direct write vapor deposition, the method comprising:

• providing a printhead comprising:
• a nozzle body including a reservoir configured to hold a material to be printed;
• and
• a nozzle head protruding from the nozzle body and including a nozzle opening in fluid communication with the reservoir, the nozzle head protruding from the nozzle body a distance of at least 10 microns and as high as 500 microns,
• delivering the material to be printed into the reservoir;
• heating the printhead to a temperature sufficient to evaporate the material or to maintain the material in a gaseous state, whereby a vapor-phase ink is formed and exits the printhead through the nozzle opening;
• and
• during the heating, moving a substrate positioned in opposition to the nozzle opening relative to the printhead, the vapor-phase ink contacting the substrate after exiting the printhead and being deposited as a solid material in a pattern determined by the relative motion of the printhead and the substrate.