Loading patent…
AssigneeEbara Corporation
InventorsKazuhiro Tajima, Makoto Kashiwagi, Manato Furusawa
Estimating the term…
A substrate is reliably suctioned regardless of a flatness of a surface to be suctioned of the substrate. A substrate suction member 330 includes a porous member 334 including a substrate suction surface 334a for suctioning a substrate WF and a pressure reducer 334b communicating with pressure reducing means, a shielding member 332 including a first shielding member 332-1 configured to shield a surface 334c in an opposite side of the substrate suction surface 334a of the porous member 334 and a frame-shaped second shielding member 332-2 configured to shield at least a part of a side surface 334d of the porous member 334, and a frame-shaped elastic seal member 336 attached to the second shielding member 332-2 so as to surround the porous member 334 and provided with a contact surface 336a in contact with the substrate WF.
A substrate suction member comprising:
An elastic seal assembly attached to a substrate suction member including a porous member and a shielding member, the porous member including a substrate suction surface for suctioning a substrate and a pressure reducer communicating with pressure reducing means, the shielding member including a first shielding member configured to shield a surface in an opposite side of the substrate suction surface of the porous member and a frame-shaped second shielding member configured to shield at least a part of a side surface of the porous member, the elastic seal assembly comprising:
Dependencies are inferred from the claim text.