Linear evaporation source
AssigneeSVMTech, LLC
InventorsKi Su Kim, Si Hyun Lee
Life of this patent
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Abstract
The present invention provides a linear evaporation source which receives heat from a crucible such that heat is uniformly distributed while a uniform heat distribution cover is seated on an accommodation case. The provided linear evaporation source includes an accommodation case forming an accommodation space with an open upper side, a crucible accommodated in the accommodation space and configured to discharge a deposition material, and a uniform heat distribution cover configured to cover the accommodation case to uniformly distribute a temperature by receiving heat from the crucible.
Claims11
A linear evaporation source comprising:
- an accommodation case forming an accommodation space with an open upper side;
- a crucible accommodated in the accommodation space and configured to discharge a deposition material;
- and
- a uniform heat distribution cover configured to cover the accommodation case to uniformly distribute a temperature by receiving heat from the crucible and a plurality of heat conduction prevention members provided between the crucible and the accommodation case to support the crucible such that the heat of the crucible is prevented from being conducted to the accommodation case, wherein the crucible includes:
- a storage case forming a storage space with an open upper side to store the deposition material;
- a seating cover which is seated on the storage case and includes a discharge nozzle which communicates with the storage space;
- and
- a leakage prevention connector configured to connect the storage case and the seating cover to prevent the vaporized deposition material from leaking between the storage case and the seating cover, wherein the leakage prevention connector includes:
- a support flange extending in a perimetric direction on the storage case;
- a seating flange extending in the perimetric direction below the seating cover to be seated on the support flange;
- and
- a heat loss prevention coupling part configured to couple the support flange and the seating flange in close contact with each other, wherein the heat loss prevention coupling part includes:
- a plurality of first fastening holes formed in the support flange and a plurality of second fastening holes formed in the seating flange to communicate with the first fastening holes and a plurality of fastening bolts inserted into the first fastening holes and the second fastening holes, and a plurality of fastening nuts fastened to the fastening bolts to prevent the fastening bolts from being separated from the first fastening holes and the second fastening holes,
- wherein each fastening bolt and a corresponding fastening nut have structures that are prevented from respectively protruding from the support flange and the seating flange when the fastening bolt and the fastening nut have been fastened to each other while inserted into the first fastening hole and the second fastening hole,
- wherein the heat conduction prevention members are prevented from moving in a width direction of the accommodation case by a movement prevention portion,
- wherein the movement prevention portion includes:
- a support-accommodation groove formed to be recessed on an inner bottom surface of the accommodation case in a longitudinal direction such that the heat conduction prevention members are accommodated therein and a seating-accommodation groove formed to be recessed at a lower side of the crucible to correspond to the support-accommodation groove such that the heat conduction prevention members are accommodated therein,
- wherein a height of the heat conduction prevention members are greater than the sum of a height of the support-accommodation groove and a height of the support-accommodation groove such that the crucible is prevented from being in direct contact with the accommodation case.
Dependencies are inferred from the claim text.