Bonding tool, semiconductor device manufacturing method, and semiconductor device
AssigneeFuji Electric Co., Ltd.
InventorHiroaki Hokazono
Life of this patent
Estimating the term…
Abstract
A bonding tool for bonding two conductive plates in contact with each other by pressing the bonding tool against the two conductive plates while vibrating a bonding end portion thereof in a direction parallel to the conductive plates. The bonding end portion of the bonding tool includes a bonding base having an end surface, the end surface having a protrusion area that has two sides facing and parallel to each other in a first direction that is parallel to the end surface, a plurality of protrusions provided in the protrusion area of the end surface, and a suppression portion provided on the end surface along the two sides of the protrusion area. The bonding end portion is configured to vibrate in the first direction.
Claims13
A bonding tool for bonding two conductive plates by pressing the bonding tool against the two conductive plates while vibrating the bonding tool in a direction parallel to the two conductive plates, the bonding tool comprising:
- a bonding end portion including
- a bonding base having an end surface, the end surface having
- a protrusion area having two sides that face each other and that extend in a first direction that is parallel to the end surface, and
- a pair of suppression areas respectively provided adjacent to and along the two sides of the protrusion area;
- a plurality of protrusions provided in the protrusion area of the end surface;
- and
- a pair of suppression portions respectively provided on the end surface in the suppression areas, and linearly extending between opposing ends of respective ones of the two sides of the protrusion area to sandwich the plurality of protrusions therebetween,
- wherein the bonding end portion is configured to vibrate in the first direction.
A semiconductor device, comprising:
- a semiconductor chip;
- a connection terminal including a bonding portion that is a flat plate;
- a plurality of wiring boards including a first wiring board on which the semiconductor chip is placed and a second wiring board having a bonding area on which the bonding portion of the connection terminal is bonded, the bonding area being located away from an outer periphery of the bonding portion of the connection terminal in a plan view of the semiconductor device, such that the bonding portion is bonded to only the bonding area and is isolated from the second wiring board at the outer periphery of the bonding portion.
Dependencies are inferred from the claim text.