Donor substrate for the transfer of a thin layer and associated transfer method
AssigneesSoitec, Commissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsLarry Vincent, Shay Reboh, Lucie Le Van-Jodin, Frédéric Milesi, Ludovic Ecarnot, Gweltaz Gaudin, Didier Landru
Life of this patent
Estimating the term…