# US 12,727,434 B2 · Workpiece attraction device

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- Number: US 12,727,434 B2
- Document ID: US12727434B2
- Status: Granted
- Kind: B2
- Application number: 18/842,217
- Filed: 2023-03-24
- Published: 2025-05-22
- Granted: 2026-09-01
- Earliest claimed: 2022-03-29
- Assignees: Creative Technology Ltd
- Applicants: Creative Technology Corporation
- Inventors: Hiromitsu Onodera
- Web page: https://patentgrep.com/patent/US12727434B2

## CPC

- B25J 15/0085: {with means for applying an electrostatic force on the object to be gripped}
- H10P 72/722: {Details of electrostatic chucks}
- B65H 29/00: Delivering or advancing articles from machines; Advancing articles to or into piles
- H01G 7/02: Electrets, i.e. having a permanently-polarised dielectric
- H02N 13/00: Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
- B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50})
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B65H: HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
- H01G: CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE (selection of specified materials as dielectric H01B3/00; capacitors having potential barriers H10D1/62, H10K10/10)
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

A workpiece attraction device is provided that can dechuck (separate) the attracted workpiece in a short time and reliably even when transporting thin workpieces such as paper, cloth, or resin films. A workpiece attraction device includes: an electrostatic attraction body (1) capable of attracting a workpiece (W) to a workpiece attraction surface (1a) by applying a voltage to an attraction electrode (4a, 4b); and a workpiece separation body (5) that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped. In the workpiece attraction device, the workpiece separation body has a plurality of opening portions (6) for applying a workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, the workpiece separation body is partitioned into the opening portions by a lattice portion (7) so that the opening portions are substantially uniformly present within a plane of the workpiece separation body, and in a plan view from a workpiece side with a workpiece attracted, the attraction electrode of the electrostatic attraction body does not face the lattice portion of the workpiece separation body.

## Claims

### Claim 1

A workpiece attraction device, comprising:
an electrostatic attraction body having an attraction electrode therein and a workpiece attraction surface capable of attracting a workpiece thereto by applying a voltage to the attraction electrode to generate a workpiece attraction force; and
a workpiece separation body that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped, wherein
the workpiece separation body has a plurality of opening portions for applying the workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, and the workpiece separation body is partitioned into the opening portions by a lattice portion so that the opening portions are substantially uniformly present within a plane of the workpiece separation body, and
in a plan view from a workpiece side with a workpiece attracted, the attraction electrode of the electrostatic attraction body does not face the lattice portion of the workpiece separation body.

### Claim 2 (depends on 1)

The workpiece attraction device according to claim 1, wherein
the lattice portion of the workpiece separation body is disposed so as to surround the attraction electrode of the electrostatic attraction body, and
in a plan view from a workpiece side with a workpiece attracted, the attraction electrode of the electrostatic attraction body does not face the lattice portion of the workpiece separation body.

### Claim 3

A workpiece attraction device, comprising:
an electrostatic attraction body having an attraction electrode therein and a workpiece attraction surface capable of attracting a workpiece thereto by applying a voltage to the attraction electrode to generate a workpiece attraction force; and
a workpiece separation body that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped, wherein
the workpiece separation body has a plurality of opening portions for applying the workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, and the workpiece separation body is partitioned into the opening portions by a lattice portion so that the opening portions are substantially uniformly present within a plane of the workpiece separation body, and
a conductive shielding member is interposed between the lattice portion of the workpiece separation body and the attraction electrode of the electrostatic attraction body.

### Claim 4 (depends on 3)

The workpiece attraction device according to claim 3, wherein the conductive shielding member is disposed on the electrostatic attraction body.

### Claim 5 (depends on 4)

The workpiece attraction device according to claim 4, wherein the conductive shielding member is connected to an earth.

### Claim 6 (depends on 3)

The workpiece attraction device according to claim 3, wherein the conductive shielding member is connected to an earth.

### Claim 7

A workpiece attraction device, comprising:
an electrostatic attraction body having an attraction electrode therein and a workpiece attraction surface capable of attracting a workpiece thereto by applying a voltage to the attraction electrode to generate a workpiece attraction force; and
a workpiece separation body that is interposed between an attracted workpiece and the electrostatic attraction body, and assists in separating the workpiece from the workpiece attraction surface after application of voltage to the attraction electrode is stopped, wherein
the workpiece separation body has a plurality of opening portions for applying the workpiece attraction force, generated on the workpiece attraction surface, toward a workpiece, and the workpiece separation body is partitioned into the opening portions by a lattice portion so that the opening portions are substantially uniformly present within a plane of the workpiece separation body,
in a plan view from a workpiece side with a workpiece attracted, the attraction electrode of the electrostatic attraction body does not face the lattice portion of the workpiece separation body, and
a conductive shielding member is interposed between the lattice portion of the workpiece separation body and the attraction electrode of the electrostatic attraction body.

### Claim 8 (depends on 7)

The workpiece attraction device according to claim 7, wherein the conductive shielding member is connected to an earth.
