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US 12,727,392 B2Granted
Multi-stack susceptor reactor for high-throughput superconductor manufacturing
AssigneeMetOx International, Inc.
InventorsShahab Khandan, Nagaraja Shashidhar, Mikhail Novozhilov
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Abstract
A vapor deposition reactor apparatus, systems and methods for deposition of thin films, particularly high-temperature superconducting (HTS) coated conductors, utilize multi-sided susceptors and susceptor pairs for increased production throughput. The reactors may also be configured in multi-stack arrangements of the susceptors within a single reactor chamber for additional throughput gains.
Claims14
A method for producing a superconductor on an elongated substrate tape, the method comprising:
- providing a deposition chamber housing a precursor inlet showerhead, an outlet port, and a heated substrate susceptor having more than one tape contacting surface comprising upper and lower surfaces of the susceptor;
- maintaining said deposition chamber under vacuum conditions via evacuation by the outlet port;
- heating each tape contacting surface of said susceptor with at least one heater element;
- translating the elongated substrate tape through a deposition zone within the chamber, wherein the substrate tape slidably contacts each of the more than one tape contacting surfaces of the susceptor;
- introducing precursor materials into the deposition chamber via the precursor showerhead;
- and
- depositing at least one layer of a thin film upon the elongated substrate tape.
4 more elements
A method for producing a superconductor on an elongated substrate tape, the method comprising:
- providing a deposition chamber housing a precursor inlet showerhead, an outlet port, and a pair of opposing one-sided susceptors;
- maintaining said deposition chamber under vacuum conditions via evacuation by the outlet port;
- heating tape contacting surfaces of each susceptor with a heater element;
- translating the elongated substrate tape through a deposition zone within the chamber, wherein the substrate tape slidably contacts the upper surface of one of the pair of opposing one-sided susceptors and the lower surface of the second of the pair of opposing one-sided susceptors;
- introducing precursor materials into the deposition chamber via the precursor showerhead;
- and
- depositing at least one layer of a thin film upon the elongated substrate tape.
4 more elements
Dependencies are inferred from the claim text.