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US 12,727,373 B2Granted
Apparatus for manufacturing display device
AssigneeSamsung Display Co., Ltd.
InventorsWoongil Choi, Hohyun Song
Life of this patent
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Abstract
Provided is an apparatus for manufacturing a display device, the apparatus including: a stage on which a display substrate is disposed; an inspecting portion disposed on the stage to inspect the display substrate; and a first horizontal moving portion configured to linearly move the stage in a first direction, wherein the first horizontal moving portion includes a lower module and an upper frame linearly moving in the first direction with respect to the lower module.
Claims20
An apparatus for manufacturing a display device, the apparatus comprising:
- a stage on which a display substrate is disposed;
- an inspecting portion disposed on the stage to inspect the display substrate;
- and
- a first horizontal moving portion configured to linearly move the stage in a first direction,
- wherein the first horizontal moving portion comprises:
- a lower module;
- and
- an upper frame linearly moving in the first direction with respect to the lower module, and
- the lower module comprises:
- a frame portion providing a frame space;
- a ball screw portion of which at least part being disposed in the frame space and including a screw shaft extending in the first direction and a nut portion coupled to the screw portion;
- a pair of rail portions extending in the first direction and fixed to the frame portion to be spaced apart from each other in a second direction crossing the first direction;
- a pair of first supports connected to the pair of rail portions so as to linearly move in the first direction;
- and
- a driving portion connected to the screw shaft to rotate the screw shaft around an axis extending in the first direction, and
- the upper frame comprises a supply flow path simultaneously supplying a lubricant to each of the nut portion and the pair of first supports and is detachably connected to each of the nut portion and the pair of first supports.
13 more elements
Dependencies are inferred from the claim text.