US 12,727,136 B2 · Carrying device for substrate carrier

Abstract

A carrier device for substrate carriers is provided, having loading grooves on the upper part of a carrier body. Protruding blocks are formed on opposite sides of the loading grooves. Each protruding block is rotatably provided with first rollers protruding into the loading groove, and the bottoms of the loading grooves are rotatably provided with second rollers. Abase of the carrier body is also provided with positioning grooves, positioning blocks are formed on opposite sides of the positioning grooves, and the positioning blocks are rotatably provided with positioning rollers protruding into the positioning groove. The upper side of the substrate carrier is vertically placed into the loading groove guided by the first rollers and supported on the second rollers, while the lower end of the substrate carrier is guided by the positioning rollers and enters the positioning groove for positioning, thereby preventing dust generated from the friction.

Claims9

Dependent claims

A carrying device for substrate carriers, comprising:

a carrier body, with an upper part provided with a plurality of loading grooves for carrying the substrate carriers, and each of the plurality of loading grooves being provided with protruding blocks on opposite sides;
a plurality of first rollers, respectively rotatably arranged on each of the protruding blocks, and the first rollers each having an outer edge protruding into the loading grooves;
and
at least one second roller disposed between every two first rollers corresponding to one loading groove and rotatably arranged at a bottom of the corresponding loading groove;
wherein a central axis of each of the first rollers is perpendicular to a central axis of the at least one second roller.

2 more elements

Dependencies are inferred from the claim text.

Carrying device for substrate carrier

Life of this patent

Carrying device for substrate carrier

Life of this patent

Abstract

Claims9