Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorSho Nagatomo
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AssigneeMurata Manufacturing Co., Ltd.
InventorSho Nagatomo
Estimating the term…
An acoustic wave device includes a piezoelectric substrate including a support substrate and a piezoelectric layer, and an IDT electrode. In the IDT electrode, a second gap region includes gap portions on an extension line in an electrode finger extending direction. A through-hole is provided in a portion of the piezoelectric layer overlapping a gap portion in plan view. A recessed portion is provided in a portion of the support substrate overlapping the through-hole in plan view. The recessed portion extends farther toward a center of the IDT electrode in the electrode finger extending direction than the portion including the through-hole. One or more layers in the piezoelectric substrate are constraining layers that constrain the piezoelectric layer at a portion overlapping an intersection region in plan view, and the piezoelectric layer includes a protruding portion that protrudes farther in the electrode finger extending direction than at least one constraining layer.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.