Energy harvesting with a micro-electro-mechanical system (MEMS)
AssigneeDuality Reality Energy, LLC
InventorJeffrey Paul Baugher
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Abstract
Apparatuses and method are described to create an energy harvesting microstructure, referred to herein as a transduction micro-electro mechanical system (T-MEMS). A T-MEMS includes a substrate, a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate. The first buckled membrane further includes a transduction material, a first conductor, the first conductor is applied to a first area of the transduction material; and a second conductor, the second conductor is applied to a second area of the transduction material, wherein electrical charge is harvested from the transduction material when the first buckled membrane is translated along the buckling axis.
Claims20
An energy harvesting microstructure, comprising:
- a substrate;
- a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate, the first buckled membrane further comprising:
- a transduction material, wherein electrical charge is to be harvested from the transduction material when the first buckled membrane is translated along the buckling axis;
- and
- a mass, the mass is mechanically coupled to move with the first buckled membrane and to apply a force to the first buckled membrane when the energy harvesting microstructure is subjected to vibration.
A method for harvesting energy from a microstructure, comprising:
- generating an electrical charge in a first buckled membrane, the first buckled membrane has a buckling axis, wherein the generating occurs while the first buckled membrane flexes;
- and
- harvesting the electrical charge from the first buckled membrane when the first buckled membrane flexes.
An energy harvesting microstructure, comprising:
- a substrate,
- a first buckled membrane, the first buckled membrane has a buckling axis and is connected to the substrate, the first buckled membrane further comprising:
- a first transduction material, the first transduction material is divided into two regions, a first region and a second region;
- an insulting material, the insulating material is disposed between the first region and the second region, wherein electrical charge is to be harvested separately from the first region and the second region when the first buckled membrane is translated along the buckling axis;
- and
- a mass, the mass is mechanically coupled to move with the first buckled membrane and to apply a force to the first buckled membrane when the energy harvesting microstructure is subjected to vibration.
Dependencies are inferred from the claim text.