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US 12,726,000 B2Granted
Bonding device and bonding method
AssigneeSumitomo Electric Industries, Ltd.
InventorsMunetaka Kurokawa, Naoki Fujiwara, Takehiko Kikuchi, Kazuo Kasaya, Takeshi Maruyama
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Abstract
A bonding device includes an irradiator that irradiates a surface of a first component with ultraviolet rays, and a conveyor that conveys the first component, wherein the irradiator irradiates the first component held by the conveyor with the ultraviolet ray, and the conveyor conveys the first component irradiated with the ultraviolet rays to a surface of a second component, and brings the surface of the first component and the surface of the second component into contact with each other to bond the first component and the second component.
Claims14
A bonding device comprising:
- an irradiator that irradiates a surface of a first component with ultraviolet rays;
- a cover comprising a cavity;
- and
- a conveyor that conveys the first component into the cover,
- wherein a gas containing oxygen is introduced into the cavity and the irradiator irradiates the first component held by the conveyor with the ultraviolet rays to generate ozone from the oxygen in the gas, the ozone hydrophilizing the surface of the first component, and
- the conveyor conveys the first component irradiated with the ultraviolet rays to a surface of a second component, and brings the surface of the first component and the surface of the second component into contact with each other to bond the first component and the second component,
- wherein a gas containing oxygen is introduced into the cavity,
- wherein a first wall of the cover facing the irradiator transmits the ultraviolet rays,
- wherein the cover has a first opening in a second wall facing the first wall,
- wherein the conveyor conveys the first component to the first opening,
- wherein the cover has a first inner wall, a second inner wall, an intake port, and an exhaust port,
- wherein the first inner wall and the second inner wall are provided in the cavity,
- wherein the first inner wall divides the cavity into a first cavity and a second cavity, and has a second opening at a position facing the first opening,
- wherein the first cavity is located between the first wall and the first inner wall,
- wherein the second cavity is located opposite to the first cavity with the first inner wall interposed therebetween,
- wherein the second inner wall is provided between the first wall and the first inner wall, extends along an outer wall of the cover, and divides the first cavity into a third cavity and a fourth cavity,
- wherein the third cavity is located between the outer wall and the second inner wall,
- wherein the fourth cavity is located inside the second inner wall and communicates with the third cavity,
- wherein the intake port is connected to a portion of the outer wall facing the third cavity, and
- wherein the exhaust port is connected to a portion of the outer wall facing the second cavity.
17 more elements
A bonding method for bonding a first component and a second component, the bonding method comprising:
- conveying, by a conveyor of a bonding device, the first component into a cover comprising a cavity;
- introducing a gas containing oxygen the cavity;
- irradiating, by an irradiator of a bonding device, a surface of the first component with ultraviolet rays, wherein the irradiator irradiates the first component held by the conveyor with the ultraviolet rays to generate ozone from the oxygen in the gas, the ozone hydrophilizing the surface of the first component;
- and
- conveying, the conveyor, the first component irradiated with the ultraviolet rays to a surface of a second component to bring the surface of the first component and the surface of the second component into contact with each other to bond the first component and the second component,
- wherein a gas containing oxygen is introduced into the cavity,
- wherein a first wall of the cover facing the irradiator transmits the ultraviolet rays,
- wherein the cover has a first opening in a second wall facing the first wall,
- wherein the conveyor conveys the first component to the first opening,
- wherein the cover has a first inner wall, a second inner wall, an intake port, and an exhaust port,
- wherein the first inner wall and the second inner wall are provided in the cavity,
- wherein the first inner wall divides the cavity into a first cavity and a second cavity, and has a second opening at a position facing the first opening,
- wherein the first cavity is located between the first wall and the first inner wall,
- wherein the second cavity is located opposite to the first cavity with the first inner wall interposed therebetween,
- wherein the second inner wall is provided between the first wall and the first inner wall, extends along an outer wall of the cover, and divides the first cavity into a third cavity and a fourth cavity,
- wherein the third cavity is located between the outer wall and the second inner wall,
- wherein the fourth cavity is located inside the second inner wall and communicates with the third cavity,
- wherein the intake port is connected to a portion of the outer wall facing the third cavity, and
- wherein the exhaust port is connected to a portion of the outer wall facing the second cavity.
16 more elements
Dependencies are inferred from the claim text.