Captive spring hooks for reduced electrostatic stress
AssigneeApplied Materials, Inc.
InventorsAdam M. McLaughlin, Diana C. Gronski, Craig R. Chaney
Life of this patent
Estimating the term…
Abstract
A faceplate and fasteners for attaching the faceplate to an ion source are disclosed. The faceplate includes a plurality of channels that open to the side of the faceplate. These channels are an elongated shape such that the channels are larger in one direction than in the orthogonal direction. The channels each terminate in an internal cavity, which has a larger size than the channels. The fasteners may be rods that are shaped such that the proximal ends of the fastener have a bent portion, which can only enter the channel when properly oriented. Once the bent portion is passed through the channel and extends into the internal cavity, the fastener can be rotated so as to secure it in place.
Claims19
An ion source, comprising:
- an arc chamber comprising a plurality of chamber walls and having a first end and a second end;
- a faceplate having an extraction aperture, disposed on a top of the plurality of chamber walls, the faceplate comprising a plurality of channels open to an exterior of the faceplate, and each channel terminating at a respective internal cavity;
- a source housing, wherein the arc chamber is disposed on the source housing;
- a plurality of fasteners, each having a proximal end with a bent portion, wherein the proximal end of each fastener passes through a respective channel and wherein the bent portion is disposed in the respective internal cavity;
- and
- a tension system in communication with a distal end of each fastener to attach each fastener to the source housing so as to secure the faceplate to the arc chamber.
A faceplate for use with an ion source, the faceplate comprising:
- a top surface;
- an opposite bottom surface configured to face an arc chamber of the ion source;
- an extraction aperture passing from the top surface to the opposite bottom surface;
- a plurality of sides formed between the top surface and the opposite bottom surface;
- and
- a plurality of channels, wherein the plurality of channels each open to a respective one of the plurality of sides, and wherein each channel terminates in a respective internal cavity.
Dependencies are inferred from the claim text.