Flow control arrangements with bypass switches, semiconductor processing systems, and related flow control methods
AssigneeASM IP Holding B.V.
InventorsGlenn Holbrook, Mark Fessler
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AssigneeASM IP Holding B.V.
InventorsGlenn Holbrook, Mark Fessler
Estimating the term…
A flow control arrangement includes a housing seating inlet and outlet conduits, an isolation valve arranged within the housing and is connected to the inlet conduit, a flow switch, and a bypass switch. The flow switch has a shutoff trigger, is arranged within the housing, and couples the isolation valve to the outlet conduit. The bypass switch is coupled to the isolation valve and has first and second positions. The flow switch is operably coupled to the isolation valve when the bypass switch is in the first position to close the isolation valve when flow rate of fluid traversing the flow switch rises above the shutoff trigger, and is operably decoupled from the isolation valve when the bypass switch is in the second position to flow fluid through the flow switch at flow rates greater than the shutoff trigger. Semiconductor processing systems and related flow control methods are also described.
A flow control arrangement, comprising:
A flow control method, comprising:
Dependencies are inferred from the claim text.