Edge placement with spatial light modulator writing

A rasterization module for preparing pixel data for writing with a spatial light modulator, the rasterization module comprising:

• a memory;
• an output interface;
• an input interface, said input interface being configured for obtaining data representing a pattern to be printed;
• and
• a processing unit, said processing unit being configured for rasterizing said pattern to be printed to a grid of pixels to form a rasterized pattern,
• said rasterizing including assigning respective edge adjustment values to pixels covering an edge of said pattern to be printed;
• said respective edge adjustment values each being a fraction of a pixel width of a respective assigned pixel of the pixels covering the edge of the pattern to be printed, said fraction of said pixel width being a position at which a respective portion of said edge is to be placed within the respective assigned pixel, with reference to a respective neighboring pixel that is covered by said pattern to be printed;
• said processing unit being further configured for dividing said rasterized pattern into a plurality of rasterized pattern planes;
• each respective rasterized pattern plane of said plurality of rasterized pattern planes being associated with a respective radiant exposure for each pixel of the grid of pixels intended to be exposed by said respective rasterized pattern plane, such that the plurality of rasterized pattern planes are associated with respective radiant exposures;
• wherein a sum of radiant exposures of said plurality of rasterized pattern planes for a pixel completely covered by said pattern to be printed exceeds a threshold for activating a radiation sensitive layer on a substrate, onto which said pattern is to be printed;
• wherein a sum of radiant exposures of said plurality of rasterized pattern planes for each respective pixel of the pixels covering the edge of said pattern to be printed is an exposure moving a respective position of where the sum of radiant exposures for the respective pixel reaches said threshold for activating said radiation sensitive layer at the respective pixel, the exposure moving the respective position by a respective distance equal to a respective edge adjustment value that is assigned to the respective pixel;
• said output interface is configured for outputting data representing said plurality of rasterized pattern planes;
• and
• wherein said processing unit is further configured for selecting said radiant exposures such that at least two of said respective radiant exposures of said plurality of rasterized pattern planes have different magnitudes with respect to each other.