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US 12,724,350 B2Granted
Pattern-forming composition
AssigneeNissan Chemical Corporation
InventorsNaoki Nakaie, Kenji Takase, Yudai Sugawara
Life of this patent
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Abstract
Provided is, for example, a pattern-forming composition that contains a triazine ring-containing polymer having a predetermined repeating unit structure, represented by formula [4] below, a crosslinking agent, and an organic solvent.
Claims3
A method for producing a pattern, the method comprising:
- applying a pattern-forming composition to a base to form a film coated on the base;
- evaporating off organic solvent from said film coated on said base;
- irradiating the film with light through a mask having a pattern formed thereon;
- developing the film to obtain a pattern;
- and
- further baking the pattern after the developing to obtain the pattern having a shape of convex lens,
- wherein the pattern-forming composition contains a triazine ring-containing polymer that contains a repeating unit structure represented by formula (1) below and at least one triazine ring terminal, at least a part of the triazine ring terminal being blocked with a hydroxy group-substituted arylamino group;
- a crosslinking agent;
- and the organic solvent,
- wherein the triazine ring-containing polymer is a hyperbranched polymer,
- wherein each of R and R′ independently represents a hydrogen atom, an alkyl group, an alkoxy group, an aryl group, or an aralkyl group, and
- Ar1 represents at least one structure selected from the group consisting of structures represented by formulae (2) to (13),
- wherein each of R1 to R92 independently represents a hydrogen atom, a halogen atom, a sulfo group, an alkyl group having 1 to 10 carbon atoms, or an alkoxy group having 1 to 10 carbon atoms,
- each of R93 and R94 represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms,
- each of W1 and W2 independently represents a single bond, CR95R96, wherein each of R95 and R96 independently represents a hydrogen atom or an alkyl group having 1 to 10 carbon atoms or where R95 and R96 form a ring together with the carbon atom to which they are attached, C═O, O, S, SO, SO2, or NR97, wherein R97 represents a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, or a phenyl group,
- each of X1 and X2 independently represents a single bond, an alkylene group having 1 to 10 carbon atoms, or a group represented by formula (14)
- wherein each of R98 to R101 independently represents a hydrogen atom, a halogen atom, a sulfo group, an alkyl group having 1 to 10 carbon atoms, or an alkoxy group having 1 to 10 carbon atoms,
- each of Y1 and Y2 independently represents a single bond or an alkylene group having 1 to 10 carbon atoms;
- wherein the hydroxy group-substituted arylamino group is represented by formula (15) below:
- and
- wherein a weight average molecular weight of the triazine ring-containing polymer is 2,000 to 10,000, the crosslinking agent is a polyfunctional (meth)acrylic compound in an amount of 5 to 90 parts by mass, per 100 parts by mass of the triazine ring-containing polymer, the organic solvent comprises N,N-dimethylformamide, dimethylsulfoxide, N-methyl-2-pyrrolidone, N,N-dimethylacetamide, 3-methoxy-N,N-dimethylpropanamide, 3-butoxy-N,N-dimethylpropanamide, or a mixed system thereof;
- the pattern-forming composition has a solid concentration of 0.1 to 40% by mass, and the further baking of the pattern is performed at 85 to 150° C. for 7 to 15 minutes after the developing to obtain the pattern having a shape of convex lens.
19 more elements
Dependencies are inferred from the claim text.