Back to results
US 12,724,343 B2Granted
Salt, quencher, resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKatsuhiro Komuro, Yuki Takahashi, Koji Ichikawa
Life of this patent
Estimating the term…
Abstract
A salt represented by formula (I), a quencher, and a resist composition including the same: wherein at least one of R4, R5 and R6 represents-X2—R7, X2 represents *—CO—O—, *—O—CO—or ——O—CO—O—, and * represents a bonding site to the benzene ring, and R7 represents a hydrocarbon group including a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and —CH2-included in the hydrocarbon group may be replaced by —O—, —S—, —SO2— or —CO—.
Claims19
A salt represented by formula (I):
- wherein, in formula (I),
- R1 represents a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and —CH2-included in the hydrocarbon group may be replaced by —O—or —CO—, provided that at least two R1 are a chain hydrocarbon group, and at least one-CH2-included in the chain hydrocarbon group is replaced by —O—or —CO—,
- R2 and R3 each independently represent a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, —CH2-included in the hydrocarbon group may be replaced by —O—or —CO—, or R2 and R3 may be bonded to each other to form a single bond or an alkanediyl bridge having 1 to 6 carbon atoms together with carbon atoms to which R2 and R3 are bonded, and —CH2-included in the alkanediyl bridge may be replaced by —O—, —S—, —CO—, —SO—or —SO2—,
- m1 represents an integer of 2 to 3, and when m1 is 2 or more, a plurality of R1 may be the same or different from each other,
- m2 represents an integer of 0 to 4, and when m2 is 2 or more, a plurality of R2 may be the same or different from each other,
- m3 represents an integer of 0 to 4, and when m3 is 2 or more, a plurality of R3 may be the same or different from each other,
- R4 represents-X2—R7,
- R4 is bonded at a meta-position with respect to a bonding site of S+ on the benzene ring,
- R5 and R6 each independently represent a hydrogen atom or —X2—R7,
- X2 represents *—CO—O—, *—O—CO—or *—O—CO—O—, and * represents a bonding site to the benzene ring, and
- R7 represents a hydrocarbon group including a cyclic hydrocarbon group having 3 to 18 carbon atoms and the cyclic hydrocarbon group may have a substituent, and —CH2-included in the hydrocarbon group may be replaced by —O—, —S—, —SO2—or —CO—,
- provided that the cyclic hydrocarbon group for R7 has at least one substituent, or at least one-CH2-included in the hydrocarbon group for R7 is replaced by —O—, —S—, —SO2—or —CO—.
9 more elements
A salt represented by formula (I):
- wherein, in formula (I),
- R1 represents a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, and —CH2-included in the hydrocarbon group may be replaced by —O—or —CO—, provided that at least two R1 are a chain hydrocarbon group, and at least one-CH2-included in the chain hydrocarbon group is replaced by —O—or —CO—,
- R2 and R3 each independently represent a halogen atom, an alkyl fluoride group having 1 to 6 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, —CH2-included in the hydrocarbon group may be replaced by —O—or —CO—, or R2 and R3 may be bonded to each other to form a single bond or an alkanediyl bridge having 1 to 6 carbon atoms together with carbon atoms to which R2 and R3 are bonded, and —CH2-included in the alkanediyl bridge may be replaced by —O—, —S—, —CO—, —SO—or —SO2—,
- m1 represents an integer of 2 to 3, and when m1 is 2 or more, a plurality of R1 may be the same or different from each other,
- m2 represents an integer of 1 to 4, and when m2 is 2 or more, a plurality of R2 may be the same or different from each other,
- m3 represents an integer of 1 to 4, and when m3 is 2 or more, a plurality of R3 may be the same or different from each other,
- R4 represents-X2—R7,
- R4 is bonded at a meta-position with respect to a bonding site of S+ on the benzene ring,
- R5 and R6 each independently represent a hydrogen atom or —X2—R7,
- X2 represents *—CO—O—, *—O—CO—or *—O—CO—O—, and * represents a bonding site to the benzene ring, and
- R7 represents a hydrocarbon group including a cyclic hydrocarbon group having 3 to 18 carbon atoms and the cyclic hydrocarbon group may have a substituent, and —CH2-included in the hydrocarbon group may be replaced by —O—, —S—, —SO2—or —CO—,
- wherein one of R2 and one of R3 are bonded to each other to form a single bond or an alkanediyl bridge having 1 to 6 carbon atoms together with carbon atoms to which R2 and R3 are bonded, and —CH2-included in the alkanediyl bridge may be replaced by —O—, —S—, —CO—, —SO—or —SO2—.
9 more elements
Dependencies are inferred from the claim text.