Angular ptychographic imaging with closed-form reconstruction

A computer program product, comprising a non-transitory computer readable medium having computer-executable instructions for performing:

• (a) reconstructing a plurality of complex field spectrums from a respective plurality of NA-matching intensity measurements;
• (b) combining the complex field spectrums to determine a reconstructed sample spectrum;
• and
• (c) using a plurality of darkfield intensity measurements to extend the reconstructed sample spectrum to obtain an image with higher resolution than the NA-matching intensity measurements.

An imaging system, comprising:

• an optical system having collection optics;
• an illumination device configured to provide illumination at a plurality of NA-matching illumination angles at a first sequence of image acquisition times and provide illumination at a plurality of darkfield illumination angles at a second sequence of image acquisition times;
• at least one radiation detector configured to receive light from the optical system and acquire a plurality of NA-matching intensity measurements and a plurality of darkfield intensity measurements;
• and
• a computing device configured to:
• (a) reconstruct a plurality of complex field spectrums from the plurality of NA-matching intensity measurements;
• (b) combine the complex field spectrums to determine a reconstructed sample spectrum;
• and
• (c) use the plurality of darkfield intensity measurements to extend the reconstructed sample spectrum to obtain an image with higher resolution than the NA-matching intensity measurements.