Wafer test cassette, wafer test system and wafer test method

A wafer test cassette, comprising:

• a first housing including a first magnetic member;
• a second housing including a second magnetic member, the second magnetic member being arranged corresponding to the first magnetic member so as to enable the first housing and the second housing to be tightly coupled to each other by which a test space is defined, a magnetic shielding assembly movably disposed in the second housing;
• wherein the first housing includes a probe card including at least one probe, and the second housing is configured to carry a wafer;
• wherein, when the first housing and the second housing are coupled to each other, the at least one probe is configured to be in contact with at least one pad of the wafer;
• a first fluid port disposed on the first housing or the second housing, and configured to receive an external gas to the test space;
• and
• a gas supply device having a first fluid path connected to the first fluid port, the gas supply device being configured to supply the external gas to the test space through the first fluid path;
• wherein after the test space receives the external gas, an air pressure value of the test space is greater than an atmospheric pressure outside the wafer test cassette;
• wherein a shielding assembly includes a pair of recess that corresponds to the second magnetic member, wherein when the shielding assembly moves to cover the second magnetic member, the recess accommodates the second magnetic member.