Physical quantity sensor and inertial measurement device

A physical quantity sensor configured to detect a physical quantity in a third direction when defining three directions perpendicular to each other as a first direction, a second direction, and the third direction, the physical quantity sensor comprising:

• a substrate;
• a movable body that is rectangular-frame-shaped, the movable body having:
• first and second sides opposite to each other along the first direction and extending along the second direction;
• third and fourth sides opposite to each other along the second direction and extending along the first direction;
• an opening in a first intermediate position of the second side;
• a first support beam extending from a second intermediate position of the third side along the second direction;
• a first fixation part at an end of the first support beam, the first fixation part being fixed to the substrate;
• a first stationary electrode unit provided directly adjacent to the first side of the movable body and extending along the second direction, an end of the first stationary electrode unit having a first stationary electrode fixation part fixed to the substrate;
• a second stationary electrode unit provided directly adjacent to the second side of the movable body and extending along the second direction, an end of the second stationary electrode unit having a second stationary electrode fixation part fixed to the substrate;
• and
• a first wiring line extending from an outside of the movable body to the first stationary electrode fixation part via the opening in a plan view, one end of the first wiring line being coupled to the first stationary electrode fixation part, wherein
• the movable body includes:
• a first movable electrode unit at the first side, the first movable electrode unit having a first movable electrode opposed to a first stationary electrode of the first stationary electrode unit;
• and
• a second movable electrode unit at the second side, the second movable electrode unit having a second movable electrode opposed to a second stationary electrode of the second stationary electrode unit, and
• a rotary torque of the second movable electrode unit when detecting the physical quantity taking the first support beam as a rotational axis is lower than a rotary torque of the first movable electrode unit when detecting the physical quantity taking the first support beam as the rotational axis.