Optical scanning system for non-destructively acquiring three-dimensional structure of object

An optical scanning system for non-destructively acquiring a three-dimensional structure of an object, comprising:

• an optical image processing device, configured to generate an optical beam along a first optical axis direction;
• and
• an optical scanning device, coupled to the optical image processing device, configured to convert the optical beam along the first optical axis direction into an optical beam along a second optical axis direction, and scan an object to be inspected by using the optical beam along the second optical axis direction, wherein the optical scanning device further comprises:
• an optical collimator, configured to convert the optical beam along the first optical axis direction into a beam parallel to the first optical axis direction;
• an optical beam scanner, disposed at an intersecting position of the first optical axis direction and the second optical axis direction, configured to convert the optical beam parallel to the first optical axis direction into an optical beam parallel to the second optical axis direction;
• a first lens group, disposed in the second optical axis direction, configured to expand or reduce the optical beam parallel to the second optical axis direction;
• a visible light camera module, disposed in the second optical axis direction, configured to capture a two-dimensional structural image corresponding to the object to be inspected;
• a second lens group, disposed in the second optical axis direction, configured to expand or reduce the optical beam parallel to the second optical axis direction;
• and
• an object lens module, disposed in the second optical axis direction and located on one side of the second lens group, configured to focus and project the optical beam parallel to the second optical axis direction onto the object to be inspected;
• wherein the optical image processing device scans the object to be inspected along a Y-axis direction by the optical scanning device to acquire a YZ cross section structural image corresponding to the object to be inspected, and then scans along an X-axis direction to acquire sequential YZ cross section structural images corresponding to the object to be inspected at different consecutive positions;
• wherein the optical image processing device further scans the object to be inspected along the X-axis direction by the optical scanning device to acquire an XZ cross section structural image corresponding to the object to be inspected at different consecutive positions, and then scans along the Y-axis direction to acquire sequential XZ cross section structural images corresponding to the object to be inspected at different consecutive positions;
• wherein the optical image processing device further reconstructs a three-dimensional structural image of the object to be inspected according to the YZ cross section structural images corresponding to the object to be inspected at different consecutive positions and the XZ cross section structural images corresponding to the object to be inspected at different consecutive positions;
• wherein in response to the object to be inspected being a glass substrate having a plurality of through glass vias (TGVs), the optical image processing device is configured to control the optical scanning device to perform a sequential scanning operation along a Z-axis direction so as to acquire a plurality of XY cross-sectional structural images at different consecutive positions within the glass substrate, and is further configured to derive, from variations among the plurality of XY cross-sectional structural images, at least one of a shape, a waist depth, a taper angle, a position, and a size of each TGVs, thereby identifying congestion and/or defects of each TGVs.