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US 12,723,980 B2Granted
Microspot reflectometer
AssigneeThe Boeing Company
InventorsBrian Gunther, James Thaddeus Wegner, Jeffery Thomas Murphy
Life of this patent
Estimating the term…
Abstract
A reflectometer configured to test a sample. The reflectometer includes a light source that emits a light beam to the sample that is placed on a sample holder. The reflectometer focuses the light beam to a reduced spot size on the sample. The reflectometer is configured to view structure/defects in the sample using a detector that is downstream from the sample.
Claims20
A reflectometer configured to test a sample, the reflectometer comprising:
- a light source configured to emit a light beam along a light path;
- a sample holder configured to position the sample along the light path;
- a mirror system positioned in the light path between the light source and the sample holder, the mirror system configured to reflect the light beam from the light source towards the sample with the mirror system comprising:
- a first mirror positioned along the light path between the light source and the sample holder, the first mirror directing the light beam away from the sample holder;
- a second mirror positioned along the light path to receive the light beam directly from the first mirror, the second mirror positioned a greater distance away from the sample holder than the light source;
- an off-axis parabolic mirror positioned between the second mirror and the sample holder, the off-axis parabolic mirror directs the light beam to the sample holder;
- a detector positioned downstream from the sample holder to receive the light beam that is reflected from the sample;
- an alignment mirror positioned between the sample holder and the detector, the alignment mirror movable between a first position within the light path to direct the light beam to a camera and a second position out of the light path to enable the light beam to be received at the detector;
- wherein the sample holder receives the light beam from the off-axis parabolic mirror and directs the light beam away from the off-axis parabolic mirror and towards the detector.
6 more elements
A reflectometer configured to test a sample, the reflectometer comprising:
- a light source that emits a light beam along a light path;
- a detector positioned downstream from the light source along the light path;
- a sample holder configured to position the sample along the light path, the sample holder positioned along the light path between the light source and the detector;
- first optical elements positioned along the light path between the light source and the sample holder, the first optical elements comprising:
- a first mirror that receives the light beam from the light source;
- a second mirror that receives the light beam directly from the first mirror with the second mirror positioned a greater distance away from the sample holder than the light source;
- an off-axis parabolic mirror positioned along the light path downstream from the second mirror and positioned in closer proximity to the sample holder than the second mirror;
- second optical elements positioned along the light path between the sample holder and the detector;
- wherein the second optical elements comprise an alignment mirror that is movable between a first position in the light path to direct the light beam to a camera that is positioned out of the light path and a second position out of the light path;
- wherein the off-axis parabolic mirror directs the light beam to the sample holder;
- wherein the sample holder directs the light beam towards the detector and away from the off-axis parabolic mirror.
8 more elements
A reflectometer configured to test a sample, the reflectometer comprising:
- a light source that emits a light beam along a light path;
- a detector positioned downstream from the light source along the light path;
- a sample holder configured to position the sample along the light path, the sample holder positioned along the light path between the light source and the detector;
- first optical elements positioned along the light path between the light source and the sample holder, the first optical elements comprising:
- an expanding mirror that causes light rays of the light beam to angle outward away from an optical axis of the light beam, the expanding mirror directs the light rays away from the sample holder;
- a collimating mirror downstream from the expanding mirror and that receives the light rays directly from the expanding mirror and that causes the light rays of the light beam to become more aligned along the light path, the collimating mirror positioned a greater distance away from the sample holder than the light source;
- an off-axis parabolic mirror downstream from the collimating mirror that focuses the light onto the sample holder;
- second optical elements positioned along the light path between the sample holder and the detector, the second optical elements comprising an alignment mirror that is movable between a first position in the light path to direct the light beam to a camera that is positioned out of the light path and a second position out of the light path;
- wherein the light beam is directed from the sample holder away from the off-axis parabolic mirror and towards the detector.
6 more elements
Dependencies are inferred from the claim text.