Gas cylinder replacement system

A gas cylinder replacement system comprising:

• a gas cabinet configured to store therein a gas pipe and a gas cylinder connected to the gas pipe;
• a gas cylinder replacement apparatus;
• and
• a controller configured to control the gas cylinder replacement apparatus,
• wherein the gas cylinder replacement apparatus includes:
• a body including a first surface and a second surface different from each other;
• a locomotion unit installed on the second surface and configured to travel in a semiconductor process line;
• a manipulator installed on the first surface and including a tool changer;
• a vision unit installed at a distal end of the manipulator and configured to determine a location of the gas cylinder;
• and
• a valve manipulation unit configurable to be attached to or detached from the first surface, wherein the valve manipulation unit includes:
• a first fastener configured to connect to the tool changer, and
• a first gripper connected to the first fastener and configured to grip and rotate a valve locking device of the gas cylinder;
• a pipe handling unit configured to be attached to or detached from the first surface, wherein the pipe handling unit includes:
• a second fastener configured to connect to the tool changer;
• a second gripper connected to the second fastener and configured to grip a connector of the gas pipe;
• and
• a gear configured to rotate the second gripper;
• gasket replacement forceps connected to the second fastener and configured to replace a gasket installed in the connector and to remove the gasket installed in the connector from the connector;
• and
• a cleaning brush connected to the second fastener and configured to clean the connector, and
• wherein the connector is configured to connect to the gas cylinder.

A gas cylinder replacement system comprising:

• a gas cabinet configured to store therein a gas pipe and a gas cylinder connected to the gas pipe;
• a gas cylinder replacement apparatus;
• and
• a controller configured to control the gas cylinder replacement apparatus,
• wherein the gas cylinder replacement apparatus includes:
• a body including a first surface and a second surface different from each other;
• a locomotion unit installed on the second surface and configured to travel in a semiconductor process line;
• a manipulator installed on the first surface and including a tool changer;
• a vision unit installed at a distal end of the manipulator and configured to determine a location of the gas cylinder;
• a valve manipulation unit configurable to be attached to or detached from the first surface;
• wherein the valve manipulation unit includes:
• a first fastener configured to connect to the tool changer;
• and
• a first gripper connected to the first fastener and configured to grip and rotate a valve locking device of the gas cylinder;
• and
• a pipe handling unit configurable to be attached to or detached from the first surface, wherein the pipe handling unit includes:
• a second fastener configured to connect to the tool changer;
• a second gripper connected to the second fastener and configured to grip a connector of the gas pipe;
• and
• a gear configured to rotate the second gripper,
• wherein the controller is configured to:
• control the manipulator to fasten the tool changer and the first fastener to each other;
• and
• control the first gripper to grip the valve locking device and rotate the valve locking device clockwise or counterclockwise such that the valve locking device is locked.