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US 12,723,000 B2Granted
Two-part reaction vessels made of glass, production method and analytical method
AssigneeLpkf Laser & Electronics AG
InventorsRobin Krüger, Malte Schulz-Ruhtenberg, Jan Van Aalst, Moritz Woller
Life of this patent
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Abstract
The invention relates to a method for producing reaction vessels from glass and to the glass reaction vessels obtainable by this method. The method comprises the following steps: 1. irradiating the surface of a first glass sheet by means of a laser beam of a wavelength for which the first glass sheet is permeable, 2. etching the first glass sheet to form recesses that extend over the complete thickness of the first glass sheet, and 3. connecting a second sheet with a surface of the first glass plate.
Claims15
A method of producing a plurality of glass reaction vessels formed as recesses in a first glass plate, comprising the steps of
- irradiating punctiform laser pulses of a wavelength for which the first glass plate is transparent onto locations of a first surface of the first glass plate at which each of the recesses is to be formed, wherein punctiform irradiated laser beams are arranged in the plane of the first surface of the first glass plate at a distance of exactly a diameter of one of the reaction vessels plus a thickness of a wall between the reaction vessels, wherein the irradiating comprises irradiating a laser beam along a circumferentially closed path at the locations and the circumferentially closed path is formed by laser beam pulses irradiated side by side,
- etching the first glass plate for a period of time sufficient to create the recesses at the locations, the etching being performed until the recesses have a depth extending through a full thickness of the first glass plate, wherein the first glass plate is subjected to etching without a mask and without etch resist,
- connecting a second plate to a second surface of the first glass plate, wherein during connecting, the second plate is arranged against the second surface of the first glass plate opposite to the first surface of the first glass plate,
- wherein the connecting is performed by placing the second surface of the first glass plate directly against the second plate and conducting heating or by anodic bonding of the second surface of the first glass plate to the second plate.
1 more element
A method of producing a plurality of glass reaction vessels formed as recesses in a first glass plate, comprising the steps of
- irradiating punctiform laser pulses of a wavelength for which the first glass plate is transparent onto locations of a first surface of the first glass plate at which each of the recesses is to be formed, wherein punctiform irradiated laser beams are arranged in the plane of the first surface of the first glass plate at a distance of exactly a diameter of one of the reaction vessels plus a thickness of a wall between the reaction vessels,
- etching the first glass plate for a period of time sufficient to create the recesses at the locations, the etching being performed until the recesses have a depth extending through a full thickness of the first glass plate, wherein the first glass plate is subjected to etching without a mask and without etch resist,
- applying a first strip conductor to the first surface of the first glass plate opposite to the second plate, and applying second strip conductors to a surface of the second plate facing the first glass plate;
- connecting a second plate to a second surface of the first glass plate, wherein during connecting, the second plate is arranged against the second surface of the first glass plate opposite to the first surface of the first glass plate,
- wherein the connecting is performed by placing the second surface of the first glass plate directly against the second plate and conducting heating or by anodic bonding of the second surface of the first glass plate to the second plate.
2 more elements
A method of producing a plurality of glass reaction vessels formed as recesses in a first glass plate, comprising the steps of
- irradiating punctiform laser pulses of a wavelength for which the first glass plate is transparent onto locations of a first surface of the first glass plate at which each of the recesses is to be formed, wherein punctiform irradiated laser beams are arranged in the plane of the first surface of the first glass plate at a distance of exactly a diameter of one of the reaction vessels plus a thickness of a wall between the reaction vessels,
- etching the first glass plate for a period of time sufficient to create the recesses at the locations, the etching being performed until the recesses have a depth extending through a full thickness of the first glass plate, wherein the first glass plate is subjected to etching without a mask and without etch resist,
- applying strip conductors on the first glass plate such that the strip conductors cover at least a section of an inner wall of the recesses
- connecting a second plate to a second surface of the first glass plate, wherein during connecting, the second plate is arranged against the second surface of the first glass plate opposite to the first surface of the first glass plate,
- wherein the connecting is performed by placing the second surface of the first glass plate directly against the second plate and conducting heating or by anodic bonding of the second surface of the first glass plate to the second plate.
2 more elements
Dependencies are inferred from the claim text.