Method of recycling helium from waste gas in semiconductor process
AssigneeSamsung Electronics Co., Ltd.
InventorsMyungbeom Park, Sungbae Kim, Jongsoo Kim, Samjong Choi
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Abstract
A method of recycling helium from a waste gas generated in a semiconductor process includes forming a first treatment gas by treating helium-containing waste gas emitted from a semiconductor process facility by using a scrubber module, transporting the first treatment gas to a purification facility, forming a first helium gas with a first purity by fractionating the first treatment gas in the purification facility, forming a second helium gas with a second purity by treating the first helium gas by using a back-end purification module in the purification facility, and providing the second helium gas to the semiconductor process facility.
Claims20
A method of recycling helium from a waste gas generated in a semiconductor process, the method comprising:
- forming a first treatment gas by treating helium-containing waste gas emitted from a semiconductor process facility by using a scrubber module;
- transporting the first treatment gas to a purification facility;
- forming a first helium gas with a first purity by fractionating the first treatment gas in the purification facility;
- forming a second helium gas with a second purity by treating the first helium gas by using a back-end purification module in the purification facility;
- and
- providing the second helium gas to the semiconductor process facility.
A method of recycling helium from a waste gas generated in a semiconductor process, the method comprising:
- using helium gas transported from a semiconductor raw material storage facility in a first process line and a second process line;
- forming a first helium-containing waste gas in the first process line and forming a second helium-containing waste gas in the second process line;
- forming a first treatment gas by processing the first helium-containing waste gas by using a scrubber module, and compressing the first treatment gas and the second helium-containing waste gas and transporting the first treatment gas and the second helium-containing waste gas to a purification facility;
- forming a second treatment gas by mixing the first treatment gas and the second helium-containing waste gas in the purification facility, and forming a first helium gas with a first purity by fractionating the second treatment gas;
- forming a second helium gas with a second purity by treating the first helium gas by using a back-end purification module in the purification facility;
- and
- compressing the second helium gas and providing the compressed second helium gas to the semiconductor raw material storage facility.
A method of recycling helium from a waste gas generated in a semiconductor process, the method comprising:
- forming a contaminant powder by burning a helium-containing waste gas emitted from a semiconductor process facility by using a scrubber module, and forming a first treatment gas by removing the contaminant powder by using a cleaning solution;
- filtering out impurity particles having a diameter of 3 nm or more contained in the first treatment gas;
- compressing the first treatment gas and transporting the compressed first treatment gas to a purification facility;
- removing at least some of impurities from the first treatment gas by performing pressure swing adsorption on the first treatment gas transported under high pressure in the purification facility;
- after a first treatment liquid is formed by liquefying the first treatment gas in the purification facility, obtaining a first helium gas with a first purity separated into vapor by increasing a temperature of the first treatment liquid by using a difference in boiling point;
- forming a second helium gas with a second purity by treating the first helium gas by using a back-end purification module in the purification facility;
- and
- compressing the second helium gas and providing the compressed second helium gas to the semiconductor process facility.
Dependencies are inferred from the claim text.