Laser processing machine, laser processing system, rotator unit apparatus, laser processing method, and method for producing probe card

A laser processing machine comprising:

• a laser light source configured to emit a linearly polarized laser beam;
• a polarization rotator unit;
• a beam rotator unit;
• a condensing optical system including at least one lens;
• at least one rotational driving actuator;
• and
• a controller, wherein
• the polarization rotator unit, the beam rotator unit, and the at least one lens are configured to apply the laser beam to a workpiece,
• the polarization rotator unit comprises a wave plate configured to change a polarization direction of the laser beam,
• the beam rotator unit comprises an irradiation angle adjusting optical system including at least one prism configured to adjust an irradiation angle of the laser beam to the workpiece by making an incident laser beam eccentric to output and making the laser beam incident on the condensing optical system at a position eccentric from a central axis thereof,
• the at least one rotational driving actuator is configured to rotate the wave plate and to rotate the irradiation angle adjusting optical system,
• the at least one lens is configured to condense the laser beam on the workpiece, and
• the controller is configured to:
• control the at least one rotational driving actuator to control a rotational speed ratio between the wave plate and the irradiation angle adjusting optical system, and
• adjust a polarized state of the laser beam by controlling the rotational speed ratio.