Method for producing a light deflection structure, use of a substrate having such a light deflection structure, and light deflection unit having such a light deflection structure

A method for producing a light deflection structure, the method comprising:

• irradiating a substrate with at least one pulsed laser beam in a first plurality of interaction regions along a first path, the first plurality of interaction regions being spaced apart from each other along the first path;
• and
• irradiating the substrate with the at least one pulsed laser beam in a second plurality of interaction regions along a second path, which is offset with respect to the first path, the second plurality of interaction regions being spaced apart from each other along the second path, wherein each respective interaction region of the first plurality of interaction regions overlaps with a corresponding interaction region of the second plurality of interaction regions;
• wherein the at least one pulsed laser beam interacts with a substrate material of the substrate in the first plurality of interaction regions and the second plurality of interaction regions to produce type II modifications of the substrate material, and
• wherein at least one process parameter of the at least one pulsed laser beam is changed from the first path to the second path so as to produce a predetermined deflection geometry.