Bath device, apparatus and system for supplying liquid
AssigneeSamsung Electronics Co., Ltd.
InventorsTakashi Sasa, Junhee Lee, Hokyun Kim, Kyoungwhan Oh, Yohan Choe
Life of this patent
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Abstract
A liquid supply bath device includes a main body including a flow passage having an inlet through which liquid flows in and an outlet through which the liquid flows out, an accommodation space in which the liquid is accommodated and of which an upper portion is opened to insert a discharge unit configured to discharge the liquid to a substrate, and a connection passage connected to the flow passage and the accommodation space. The liquid supply bath device further includes an opening/closing valve disposed on the main body and configured to open and close the connection passage.
Claims18
A liquid supply bath device comprising:
- a main body including a flow passage having an inlet through which liquid flows in and an outlet through which the liquid flows out, an accommodation space in which the liquid is accommodated and of which an upper portion is opened to insert a discharge unit configured to discharge the liquid to a substrate, and a connection passage connected to the flow passage and the accommodation space;
- and
- an opening/closing valve disposed on the main body and configured to open and close the connection passage,
- wherein the main body further comprises a cleaning liquid inlet portion connected to the accommodation space and configured to supply cleaning liquid to the accommodation space.
A liquid supply apparatus comprising:
- a liquid supply bath device including a main body including a flow passage having an inlet through which liquid flows in and an outlet through which the liquid flows out, an accommodation space of which an upper portion is opened and in which the liquid is accommodated, and a connection passage connected to the flow passage and the accommodation space, and an opening/closing valve disposed on the main body and configured to open and close the connection passage;
- and
- a discharge unit detachably inserted into the accommodation space, and configured to suck the liquid in the accommodation space and discharge the liquid to a substrate,
- wherein the main body further comprises a discharge passage connected to the accommodation space and configured to discharge the liquid in the accommodation space, and a cleaning liquid inlet portion connected to the accommodation space and configured to supply cleaning liquid to the accommodation space.
A liquid supply system comprising:
- a supply tank connected to a liquid supply source;
- a liquid supply line connected to the supply tank and configured to transport a liquid flowing out from the supply tank;
- a circulation line in which a circulation opening/closing valve is disposed and configured to circulate the liquid supplied through the liquid supply line to the supply tank;
- a liquid supply bath device including a main body including a flow passage having an inlet connected to the liquid supply line and through which the liquid flows in and an outlet connected to the circulation line and through which the liquid flows out, an accommodation space of which an upper portion is opened and in which the liquid is accommodated, and a connection passage connected to the flow passage and the accommodation space, and an opening/closing valve disposed on the main body and configured to open and close the connection passage;
- and
- a discharge unit detachably inserted into the accommodation space, and configured to suck the liquid in the accommodation space and discharge the liquid to a substrate,
- wherein the main body further comprises a discharge passage connected to the accommodation space and configured to discharge the liquid in the accommodation space, and a cleaning liquid inlet portion connected to the accommodation space and configured to supply cleaning liquid to the accommodation space.
Dependencies are inferred from the claim text.