Humidity control system for EFEM using desiccant

A humidity control system for an equipment front end module (EFEM) using desiccant, the humidity control system comprising:

• the EFEM including a transfer chamber being a space, in which a processing target object is transferred into a processing module;
• and
• a desiccant equipment installed in the EFEM to be separable, and configured to control a humidity of the transfer chamber,
• wherein the desiccant equipment includes a plurality of block bodies,
• wherein the plurality of block bodies are configured to be coupled to or separated from each other, and are configured to be transportable individually,
• wherein each of the plurality of block bodies accommodates at least one humidity control equipment, and
• wherein the at least one humidity control equipment includes:
• a desiccant rotor including an adsorbent configured to adsorb moisture of air that is to be supplied to the transfer chamber, and being rotated by a driving motor;
• and
• a regenerative heater configured to heat the air and cause the heated air to remove the moisture adsorbed to the adsorbent.