Semiconductor device having a detachable foil, power electronics arrangement, and method for fabricating a semiconductor device
AssigneeInfineon Technologies Austria AG
InventorGerardo Pantoja
Life of this patent
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Abstract
A semiconductor device includes: at least one power semiconductor die; a substrate having a first side and an opposite second side, the at least one power semiconductor die being arranged over the first side; an encapsulation encapsulating the at least one power semiconductor die; a pre-cured lamination layer covering the second side of the substrate, the pre-cured lamination layer being exposed from the encapsulation and configured to provide electrical insulation for the substrate after curing; and a detachable foil covering the pre-cured lamination layer, the detachable foil being configured to be removed from the pre-cured lamination layer.
Claims21
A semiconductor device, comprising:
- at least one power semiconductor die;
- a substrate comprising a first side and an opposite second side, wherein the at least one power semiconductor die is arranged over the first side;
- an encapsulation encapsulating the at least one power semiconductor die;
- a pre-cured lamination layer covering the second side of the substrate, the pre-cured lamination layer being exposed from the encapsulation and configured to provide electrical insulation for the substrate after curing;
- and
- a detachable foil covering the pre-cured lamination layer, the detachable foil being configured to be removed from the pre-cured lamination layer.
A power electronics arrangement, comprising:
- a detachable foil;
- and
- a plurality of semiconductor packages or semiconductor modules arranged on the detachable foil and comprising:
- at least one power semiconductor die;
- a substrate comprising a first side and an opposite second side, wherein the at least one power semiconductor die is arranged over the first side;
- an encapsulation encapsulating the at least one power semiconductor die;
- and
- a pre-cured lamination layer covering the second side of the substrate, the pre-cured lamination layer being exposed from the encapsulation and configured to provide electrical insulation for the substrate after curing,
- wherein the semiconductor packages or semiconductor modules are arranged on the detachable foil such that the detachable foil covers the pre-cured lamination layer,
- wherein the detachable foil is configured to be removed from the pre-cured lamination layer.
A method for fabricating a semiconductor device, the method comprising:
- providing at least one power semiconductor die;
- providing a substrate comprising a first side and an opposite second side, wherein the at least one power semiconductor die is arranged over the first side;
- providing an encapsulation encapsulating the at least one power semiconductor die;
- laminating over the second side of the substrate with a pre-cured lamination layer such that the pre-cured lamination layer is exposed from the encapsulation, wherein the pre-cured lamination layer is configured to provide electrical insulation for the substrate after curing;
- and
- covering the pre-cured lamination layer with a detachable foil, the detachable foil being configured to be removed from the pre-cured lamination layer.
Dependencies are inferred from the claim text.