US 12,721,100 B2 · Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of determining presence or absence of substrate

Abstract

According to the present disclosure, there is provided a technique capable of suppressing an erroneous detection of a presence or absence of a substrate caused by a light receiver receiving a specularly reflected light. There is provided a technique that includes: a holding structure provided with a placing surface capable of accommodating a substrate thereon; a light detector including: a light emitter arranged to irradiate an irradiation light toward a back surface of the substrate placed on the placing surface; and a light receiver arranged to be capable of receiving a diffusely reflected light of the irradiation light irradiated from the light emitter without receiving a specularly reflected light of the irradiation light; and a controller configured to be capable of determining a presence or absence of the substrate based on a light receiving state of the light receiver.

Claims19

Dependent claims

A substrate processing apparatus comprising:

a holding structure provided with a placing surface capable of accommodating a substrate thereon;
a light detector comprising:
a light emitter arranged to irradiate an irradiation light toward a back surface of the substrate placed on the placing surface;
and
a light receiver arranged to be capable of receiving a diffusely reflected light of the irradiation light irradiated from the light emitter without receiving a specularly reflected light of the irradiation light;
and
a controller configured to be capable of determining a presence or absence of the substrate based on a light receiving state of the light receiver,
wherein the controller is configured to determine that the substrate is placed on the placing surface when the light receiver receives neither the specularly reflected light nor the diffusely reflected light.

5 more elements

Dependencies are inferred from the claim text.

Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of determining presence or absence of substrate

Life of this patent

Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium capable of determining presence or absence of substrate

Life of this patent

Abstract

Claims19