Method and device to regulate purge into a container

A method of controlling flow of purge gas into a substrate container, comprising:

• determining purge gas flow rates for each of a plurality of gas distribution surfaces of a network of gas distribution devices of the substrate container, based on one or more purge performance parameters;
• and
• configuring a purge flow distribution system of the substrate container, wherein the purge flow distribution system includes:
• a plurality of flow paths, each flow path configured to provide purge gas to at least one of the plurality of gas distribution surfaces;
• and
• a plurality of flow controls, each of the plurality of flow controls configured to individually adjust the flow provided to one of the plurality of gas distribution surfaces,
• wherein the configuring the purge flow distribution system of the substrate container comprises configuring the purge flow distribution system to divide one or more input flows such that the determined purge gas flow rates are provided to each of the plurality of gas distribution surfaces.