Conveyance method and processing system

Abstract

This method is for conveying, in a processing system comprising at least one processing unit that performs a desired process on substrates and a conveyance unit that conveys the substrates to the processing unit, a plurality of substrates, which are to be continuously processed, from the conveyance unit to the processing unit. To each of the substrates, an adjustment value for optionally changing processing time is assigned in advance. The method comprises: a step for acquiring an adjustment value allocated to a first substrate to be processed this time; a step for acquiring a reference adjustment value allocated to a reference substrate processed before the first substrate; a step for acquiring an actual time which is an actual time of processing performed on the reference substrate; a step for calculating a predictive processing time for the first substrate by reflecting, on the actual time, a difference between the adjustment value allocated to the first substrate and the reference adjustment time; and a step for adjusting, on the basis of the calculated predictive processing time, a conveyance timing of a second substrate to be processed after the first substrate.

Dependencies are inferred from the claim text.