Phase change material switch with efficient heat spreader and methods for forming the same

A method of forming a phase change material (PCM) switch, comprising:

• forming a first interconnect-level dielectric;
• forming a heat spreader within the first interconnect-level dielectric;
• forming a second interconnect-level dielectric over the heat spreader;
• forming a trench in the second interconnect-level dielectric;
• forming a heater pad within the trench;
• recessing an upper surface of the heater pad below an upper surface of the second interconnect-level dielectric;
• forming a dielectric capping layer over the recessed heater pad;
• forming a phase change material element over the dielectric capping layer and over the upper surface of the second interconnect-level dielectric;
• forming a first electrode in contact with the phase change material element;
• and
• forming a second electrode in contact with the phase change material element, wherein the first electrode, the second electrode, the heater pad, the dielectric capping layer, and the phase change material element are configured as a radio frequency switch.

A method of forming a phase change material (PCM) switch, comprising:

• forming a first interconnect-level dielectric;
• forming a heat spreader within the first interconnect-level dielectric;
• forming a second interconnect-level dielectric over the heat spreader;
• forming a phase change material element over the second interconnect-level dielectric;
• forming a heating element over the phase change material element, wherein forming the heating element over the phase change material element comprises forming a heater pad over the phase change material element;
• forming a first electrode in contact with the phase change material element;
• and
• forming a second electrode in contact with the phase change material element,
• wherein the phase change material element comprises a phase change material that switches between an electrically conducting phase and an electrically insulating phase by application of a heat pulse from the heating element, and
• wherein the first electrode, the second electrode, the heating element, and the phase change material element are configured as a radio frequency switch.