Method for preparing reservoir element
AssigneeInstitute of Microelectronics, Chinese Academy of Sciences
InventorsXiaoxin Xu, Wenxuan Sun, Jie Yu, Jinru Lai, Xu Zheng, Danian Dong
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AssigneeInstitute of Microelectronics, Chinese Academy of Sciences
InventorsXiaoxin Xu, Wenxuan Sun, Jie Yu, Jinru Lai, Xu Zheng, Danian Dong
Estimating the term…
A method for manufacturing a reservoir computing apparatus, related to artificial intelligence. The method comprises: step a), providing a bottom electrode layer, a dielectric layer, a resistive switching layer, and a top electrode layer based on the above-listed sequence on a substrate to obtain a to-be-annealed reservoir computing apparatus; and step b), annealing the to-be-annealed reservoir computing apparatus to obtain the reservoir computing apparatus, where a temperature of the annealing ranges from 300° C. to 700° C., and duration of the annealing duration ranges from 30s to 100s. The manufactured reservoir computing apparatus is subject to rapid annealing, which redistributes defects, forms a more stable film, and introduces a ferroelectric O-phase into the film. The rapid annealing reduces power consumption and improves computing accuracy effectively.
A method for manufacturing a reservoir computing apparatus, comprising:
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