Method for manufacturing display panel with metal sapcer connected to cathode
AssigneeShenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorZehu Hu
Life of this patent
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Abstract
A display panel, a manufacturing method thereof, and an electronic device are provided. By disconnecting a portion of the organic functional layer in the display panel positioned on the metal spacer and other parts of the organic function layer, and exposing a side of the metal spacer, a cathode and a metal spacer can be directly connected when the cathode is formed by a vapor deposition on the entire surface. There is no need for additional masks and the process of etching organic functional layers, therefore a manufacturing process can be simplified, and the production cost can be reduced.
Claims8
A method of manufacturing a display panel, comprising:
- providing a substrate, wherein the substrate comprises a base substrate and a thin film transistor array layer positioned on the base substrate;
- the thin film transistor array layer comprises an auxiliary cathode, a signal trace, and a passivation protection layer;
- the auxiliary cathode is disposed between the signal trace and the base substrate, and electrically connected to the signal trace;
- the passivation protection layer is disposed on a side of the signal trace facing away from the base substrate;
- etching the passivation protection layer to form an opening penetrating through the passivation protection layer, wherein the opening exposes part of the signal trace, and a width of the opening gradually decreases from a side away from the base substrate to a side close to the base substrate;
- forming a metal spacer on the signal trace at the opening;
- forming a planarization layer on the passivation protection layer, and etching the planarization layer to expose an upper surface of the metal spacer;
- etching the passivation protection layer around the metal spacer to expose a side edge of the metal spacer;
- forming an anode and a pixel definition layer in sequence on the passivation protection layer, and etching the pixel definition layer to expose the upper surface and the side edge of the metal spacer;
- depositing an organic functional layer on the pixel definition layer, wherein a portion of the organic functional layer deposited and formed on the metal spacer is disconnected from other portions of the organic functional layer, and the side edge of the metal spacer is exposed;
- and
- depositing a cathode on the organic functional layer, wherein the cathode is connected to the side edge of the metal spacer;
- wherein a thickness of the metal spacer is greater than a thickness of the organic functional layer;
- wherein a thickness of the cathode is greater than a thickness of the organic functional layer at every point on the organic functional layer;
- wherein a width of the metal spacer gradually decreases from an end away from the base substrate to an end close to the base substrate, such that the side edge of the metal spacer has a bevel surface;
- and the other portions of the organic functional layer extend to and are in contact with the bevel surface of the metal spacer.
Dependencies are inferred from the claim text.