Structure of ultraviolet light sensing-enhanced photodiode
AssigneeTaiwan-Asia Semiconductor Corporation
InventorsChuan-Wei Chen, Yen-Chun Tseng
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AssigneeTaiwan-Asia Semiconductor Corporation
InventorsChuan-Wei Chen, Yen-Chun Tseng
Estimating the term…
The present disclosure provides a structure of an ultraviolet light sensing-enhanced photodiode. The main structure of the photodiode includes a silicon photodiode and an infrared conversion layer formed on a surface that receives an ultraviolet light of the of the silicon photodiode. When the ultraviolet light irradiates on the ultraviolet light sensing-enhanced photodiode through the infrared conversion layer, the infrared conversion layer converts the ultraviolet light into an infrared light. The first portion of the infrared light is propagated to the silicon photodiode and then converted to a photoelectric current. The second portion of the infrared light is absorbed by the infrared conversion layer. An infrared reflection layer is also provided for reflecting the third portion of the infrared light that is originally escaped from the infrared reflection layer, and the third portion of the infrared light can be reflected into the silicon photodiode.
An ultraviolet light sensing-enhanced photodiode, including:
Dependencies are inferred from the claim text.