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AssigneeUNM Rainforest Innovations
InventorsFrancesca Cavallo, Emma Renteria
Estimating the term…
The disclosed methods integrate EMI shielding with visible-to-IR or IR photodetection functionalities in flexible semiconductor/2D material devices, including photodiodes and photoconductive detectors. The processes generally involve transferring a 2D material onto a semiconductor membrane, depositing dielectric layers for electrical isolation and material protection, patterning windows and electrodes using photolithography and etching techniques, and forming top and bottom electrical contacts through metal deposition and lift-off processes. Additional steps include fabricating contact pads on a flexible receiving substrate, bonding the multifunctional material stack to the substrate, and releasing the structure through selective wet or dry etching of a sacrificial layer. The released device is then transferred, often via deionized water, and adhered to the flexible substrate, producing a mechanically flexible, multifunctional nanosheet capable of both electromagnetic interference shielding and infrared or broadband photodetection.
A method to integrate EMI shielding and visible-to-IR detector functionalities in a semiconductor/2D material photodiode comprising the steps of:
A method to integrate EMI shielding and IR detector functionalities in a nanosheet for a semiconductor/2D material photodiode comprising the steps of:
A method to integrate EMI shielding and IR detector functionalities in a nanosheet for a semiconductor photoconductive detector comprising the steps of:
Dependencies are inferred from the claim text.