Three dimensional flash memory with bulk erasing
AssigneeIucf-Hyu (Industry-University Cooperation Foundation Hanyang University)
InventorsYun Heub Song, Bongseok Kim, Inho Nam
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Abstract
A three-dimensional flash memory for promoting integration, and a manufacturing method therefor are disclosed. The three-dimensional flash memory to which a cell on peripheral circuit (COP) structure is applied comprises: a substrate having at least one transistor of a peripheral circuit, formed according to the COP structure; at least one memory cell string formed to extend in one direction above the at least one transistor; and a common source line commonly used by means of the at least one transistor and the at least one memory cell string.
Claims15
A three-dimensional (3D) flash memory employing a cell on peripheral circuit (COP) structure, the 3D flash memory comprising:
- a substrate comprising at least one transistor of a peripheral circuit formed based on the COP structure;
- at least one memory cell string extending in a first direction from an upper portion of the at least one transistor;
- and
- a common source line in direct contact with the substrate and commonly used, as a source line, by each of the at least one transistor and the at least one memory cell string.
A 3D flash memory employing a cell on peripheral circuit (COP) structure, comprising:
- a substrate comprising at least one transistor of a peripheral circuit formed based on the COP structure;
- at least one memory cell string extending in a first direction from an upper portion of the at least one transistor;
- and
- a connection part comprising an epitaxial structure connected to the at least one memory cell string, the epitaxial structure being in direct contact with the substrate.
A 3D flash memory for integration, comprising:
- a first memory cell array comprising:
- at least one first memory cell string extending in a vertical direction;
- and
- first wordlines connected to the at least one first memory cell string and extending in a horizontal direction perpendicularly to the at least one first memory cell string, wherein the first wordlines are stacked, extend with mutually different lengths, and respectively comprise a step part and a plan part;
- a second memory cell array comprising:
- at least one second memory cell string extending in the vertical direction;
- and
- second wordlines connected to the at least one second memory cell string and extending in the horizontal direction perpendicularly to the at least one second memory cell string, wherein the second wordlines are stacked, extend with mutually different lengths, and respectively comprise a step part and a plan part;
- and
- a row decoder between the first memory cell array and the second memory cell array, the row decoder comprising at least one wordline control line,
- wherein the at least one wordline control line is connected to the first memory cell array through a first contact, and is connected to the second memory cell array through a second contact.
Dependencies are inferred from the claim text.