Electrode assembly for a plasma discharge
AssigneeCinogy GmbH
InventorsDirk Wandke, Ronny Lettke
Life of this patent
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Abstract
An electrode arrangement for forming a dielectric barrier discharge between at least one electrode and a surface to be treated of an electrically conductive body, said surface acting as a ground electrode, with a dielectric that completely covers the electrode to the surface to be treated, said dielectric forming a contact side for the surface to be treated, and with a control device that comprises a high-voltage stage for supplying the electrode with an alternating high voltage required for generating the plasma, said control device emitting the alternating high voltage to the electrode in the form of individual pulse signals, characterized in that the control device is configured to generate two successive opposite-pole pulse signals.
Claims7
An electrode arrangement for forming a dielectric barrier discharge between at least one electrode and a surface to be treated of an electrically conductive body, said surface acting as a ground electrode, comprising:
- a dielectric that completely covers the at least one electrode to the surface to be treated, wherein said dielectric forms a contact side for the surface to be treated;
- and
- a control device that comprises a high-voltage stage for supplying the at least one electrode with an alternating high voltage required for generating a plasma,
- wherein the control device emits the alternating high voltage to the at least one electrode in individual pulse signals,
- wherein the control device is configured to
- generate two successive opposite-pole pulse signals in damped oscillations such that an initial half-wave of a first pulse signal has an opposite polarity to an initial half-wave of a subsequent second pulse signal, and
- feed the opposite-pole pulse signals successively to the same at least one electrode, and
- wherein a ratio of pulse duration of a single pulse signal to a pulse distance of two pulse signals is greater than 1:10.
An electrode arrangement for forming a dielectric barrier discharge between at least one electrode and a surface to be treated of an electrically conductive body, said surface acting as a ground electrode, comprising:
- a dielectric that completely covers the at least one electrode to the surface to be treated, wherein said dielectric forms a contact side for the surface to be treated;
- and
- a control device that comprises a high-voltage stage for supplying the at least one electrode with an alternating high voltage required for generating a plasma,
- wherein the control device emits the alternating high voltage to the at least one electrode in individual pulse signals, and
- wherein the control device is configured to
- generate two successive opposite-pole pulse signals in damped oscillations such that an initial half-wave of a first pulse signal has an opposite polarity to an initial half-wave of a subsequent second pulse signal, and
- feed the opposite-pole pulse signals successively to the same at least one electrode,
- wherein the control device emits the individual pulse signals to the at least one electrode such that a number of pulse signals with a first polarity are emitted one after the other and then a same number of pulse signals with a second polarity opposite to the first polarity are emitted one after the other, and
- wherein the number of pulse signals of the first polarity is smaller than or equal to ten.
Dependencies are inferred from the claim text.