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US 12,719,437 B2Granted
Piezoelectric resonator device
AssigneeDaishinku Corporation
InventorsSatoru Ishino, Hiroaki Yamashita
Life of this patent
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Abstract
A piezoelectric resonator device according to one or more embodiments may be provided, in which a crystal resonator plate includes a cutout part between a vibrating part and an external frame part, and a metal film formed on a first main surface of a first sealing member is electrically connected to an external electrode terminal formed on a second main surface, which does not face an internal space, of a second sealing member via a first internal wiring formed on an inner wall surface of the external frame part.
Claims9
A piezoelectric resonator device, comprising:
- a piezoelectric resonator plate including a first excitation electrode formed on a first main surface of a substrate, and a second excitation electrode formed on a second main surface of the substrate, the second excitation electrode making a pair with the first excitation electrode;
- a first sealing member covering the first excitation electrode of the piezoelectric resonator plate;
- a second sealing member covering the second excitation electrode of the piezoelectric resonator plate;
- and
- an internal space formed by bonding the first sealing member to the piezoelectric resonator plate and furthermore bonding the second sealing member to the piezoelectric resonator plate, the internal space hermetically sealing a vibrating part including the first excitation electrode and the second excitation electrode of the piezoelectric resonator plate, wherein
- the piezoelectric resonator plate includes:
- the vibrating part;
- an external frame part surrounding an outer periphery of the vibrating part;
- a support part connecting the vibrating part and the external frame part;
- and a cutout part formed by cutting out the piezoelectric resonator plate between the vibrating part and the external frame part, and
- a grounding electrode formed on a main surface of the first sealing member is electrically connected to an external electrode terminal formed on a main surface, which does not face the internal space, of the second sealing member via an internal wiring formed on an inner wall surface of the external frame part of the piezoelectric resonator plate.
8 more elements
Dependencies are inferred from the claim text.