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US 12,719,241 B2Granted
Processing head and laser processing apparatus
AssigneeSeiko Epson Corporation
InventorYoshitomo Kumai
Life of this patent
Estimating the term…
Abstract
A processing head including a first laser array element in which a plurality of first photonic crystal lasers are arranged in a first direction, and a second laser array element in which a plurality of second photonic crystal lasers are arranged in the first direction, the first laser array element and the second laser array element emit laser light in a third direction intersecting the first direction and a second direction to a processing target object while being relatively moved with respect to the processing target object in the second direction intersecting the first direction, and when viewed from the second direction, the second end photonic crystal laser and the second intermediate photonic crystal laser overlap each other.
Claims9
A processing head comprising:
- a first laser array element including a plurality of first photonic crystal lasers arranged in a first direction;
- a second laser array element including a plurality of second photonic crystal lasers arranged in the first direction, wherein
- the first laser array element and the second laser array element emit laser light in a third direction intersecting the first direction and a second direction to a processing target object while being relatively moved with respect to the processing target object in the second direction intersecting the first direction,
- a first end photonic crystal laser among the plurality of first photonic crystal lasers is located furthest in an opposite direction from the first direction among the plurality of first photonic crystal lasers,
- a second end photonic crystal laser among the plurality of first photonic crystal lasers is located furthest in the first direction among the plurality of first photonic crystal lasers,
- a first intermediate photonic crystal laser among the plurality of first photonic crystal lasers is located between the first end photonic crystal laser and the second end photonic crystal laser,
- a third end photonic crystal laser among the plurality of second photonic crystal lasers is located furthest in the opposite direction among the plurality of second photonic crystal lasers,
- a fourth end photonic crystal laser among the plurality of second photonic crystal lasers is located furthest in the first direction among the plurality of second photonic crystal lasers,
- a second intermediate photonic crystal laser among the plurality of second photonic crystal lasers is located between the third end photonic crystal laser and the fourth end photonic crystal laser, and
- when viewed from the second direction, the second end photonic crystal laser and the second intermediate photonic crystal laser next to the third end photonic crystal laser overlap each other.
7 more elements
A processing head comprising:
- a first laser array element including a plurality of first photonic crystal lasers arranged in a first direction;
- a second laser array element including a plurality of second photonic crystal lasers arranged in the first direction, wherein
- the first laser array element and the second laser array element emit laser light in a third direction intersecting the first direction and a second direction to a processing target object while being relatively moved with respect to the processing target object in the second direction intersecting the first direction,
- a first end photonic crystal laser among the plurality of first photonic crystal lasers is located furthest in an opposite direction from the first direction among the plurality of first photonic crystal lasers,
- a second end photonic crystal laser among the plurality of first photonic crystal lasers is located furthest in the first direction among the plurality of first photonic crystal lasers,
- a first intermediate photonic crystal laser among the plurality of first photonic crystal lasers is located between the first end photonic crystal laser and the second end photonic crystal laser,
- a third end photonic crystal laser among the plurality of second photonic crystal lasers is located furthest in the opposite direction among the plurality of second photonic crystal lasers,
- a fourth end photonic crystal laser among the plurality of second photonic crystal lasers is located furthest in the first direction among the plurality of second photonic crystal lasers,
- a second intermediate photonic crystal laser among the plurality of second photonic crystal lasers is located between the third end photonic crystal laser and the fourth end photonic crystal laser, and
- when viewed from the second direction, the second end photonic crystal laser and the second intermediate photonic crystal laser overlap each other,
- the processing head is configured such that a region of the processing target object where the second end photonic crystal laser passes is laser-processed by not emitting laser light from the second end photonic crystal laser and by emitting laser light from the second intermediate photonic crystal laser.
8 more elements
Dependencies are inferred from the claim text.